Hexachlorodisilane

How to detect Hexachlorodisilane

Formula: Cl6Si2 | CAS: 13465-77-5

Specification

Specification Value/Information
Formula Cl6Si2
CAS no. 13465-77-5
Gas Response Factor, 11.7 eV NA
Gas Response Factor, 10.6 eV 8
Gas Response Factor, 10.0 eV ZR
ppm per mg/m⁻³, (20 °C, 1 bar) 0.089
Specification Value/Information
Molecular Weight, g/mole 269.0
Boiling point, °C 144
Flash point, °C 78
Density, g.cm⁻³ 1.562
Ionisation Energy, eV 10.4

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