Hexamethyldisilazane, 1,1,1,3,3,3-.

HMDS

How to detect Hexamethyldisilazane, 1,1,1,3,3,3-.

Formula: C6H18NSi2 | CAS: 999-97-3

Synonyms: HMDS

Specification

SpecificationValue/Information
FormulaC6H18NSi2
CAS no.999-97-3
Gas Response Factor, 11.7 eV0.53
Gas Response Factor, 10.6 eV0.45
Gas Response Factor, 10.0 eV0.5
ppm per mg/m⁻³, (20 °C, 1 bar)0.149
Molecular Weight, g/mole161.0
SpecificationValue/Information
Melting point, °C-78
Boiling point, °C125
Flash point, °C8
Lower Explosive Limit, %0.8
Density, g.cm⁻³0.765
Ionisation Energy, eV8.6

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