Hexamethyldisilazane, 1,1,1,3,3,3-.

HMDS

How to detect Hexamethyldisilazane, 1,1,1,3,3,3-.

Formula: C6H18NSi2 | CAS: 999-97-3

Synonyms: HMDS

Specification

Specification Value/Information
Formula C6H18NSi2
CAS no. 999-97-3
Gas Response Factor, 11.7 eV 0.53
Gas Response Factor, 10.6 eV 0.45
Gas Response Factor, 10.0 eV 0.5
ppm per mg/m⁻³, (20 °C, 1 bar) 0.149
Molecular Weight, g/mole 161.0
Specification Value/Information
Melting point, °C -78
Boiling point, °C 125
Flash point, °C 8
Lower Explosive Limit, % 0.8
Density, g.cm⁻³ 0.765
Ionisation Energy, eV 8.6

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