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Semiconductor

Gas Sensors for the Semiconductor Industry

Our PID Gas Sensors can detect VOC at a very low concentration which means that contamination or fugitive VOC can be sensed. Ensuring a clean environment is very important in the semiconductor industry so using the ION Science PID is the perfect solution to achieve the highest level of product quality control.

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Gas Sensors for the Semiconductor Industry

PPM Gas Sensor – MiniPID 2

Range: 0 to 4000 ppm. Minimum detection limit: 100 ppb. 10.6 eV lamp. The PPM gas sensor - MiniPID 2 is designed for detecting VOCs over the widest dynamic range on the market without compromising performance.

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PPB Gas Sensor – MiniPID 2

Range: 0 to >40 ppm. Minimum detection limit: 1 ppb. 10.6 eV lamp. The PPB gas sensor - MiniPID 2 is optimised to deliver an exceptionally low background which allows for optimum low-end sensitivity.

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10.0 eV Gas Sensor – MiniPID 2

Range: 0 to >100 ppm. Minimum detection limit: 5 ppb. 10.0 eV lamp. The 10.0 eV gas sensor - MiniPID 2 is used for enhanced selectivity of compounds with lower ionisation energies.

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11.7 eV Gas Sensor – MiniPID 2

Range: 0 to >100 ppm. Minimum detection limit: 100 ppb. 11.7 eV lamp. The 11.7 eV gas sensor lamp extends the range of detectable compounds, only available from ION Science.

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High Sensitivity Gas Sensor – MiniPID 2

Range: 0 to 3 ppm. Minimum detection limit: 0.5 ppb. 10.6 eV lamp. The high sensitivity gas sensor, is the highest sensitivity gas sensor for sub PPB level detection.

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Resource Centre

Here you will find several important downloadable resources, to help you understand and manage your exposure to gases in the Semiconductor industry and to help strengthen hazard management at work by using ION Science sensors.

Please click the link below to view our range of Sensor resources:

Sensor Resources